Bengaluru
India
5
2026-03-12
The entities that hold a legal rights for patent applications filed by inventor PANAVALAPPIL KUMARANKUTTY Hanish Kumar:
Hanish Kumar PANAVALAPPIL KUMARANKUTTY from Bengaluru, IN has applied for patents for these inventions. The list has both pending applications and granted patents:
PROCESSING CHAMBER WITH GAS RECYCLING
#2 | 2025-09-18ELECTROSTATIC CHUCK WITH IMPROVED TEMPERATURE CONTROL
#3 | 2024-11-07PROCESSING CHAMBER WITH GAS RECYCLING
#4 | 2022-01-06Electrostatic chuck with improved temperature control
#5 | 2018-07-26Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformity
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