Eindhoven
Netherlands
8
2022-03-17
The entities that hold a legal rights for patent applications filed by inventor UR-REHMAN SAMEE:
SAMEE UR-REHMAN from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD FOR METROLOGY OPTIMIZATION
#2 | 2021-08-19Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
#3 | 2019-10-24Method of determining a value of a parameter of interest of a target formed by a patterning process
#4 | 2019-09-19Method of measuring, device manufacturing method, metrology apparatus, and lithographic system
#5 | 2019-08-08Method of optimizing a metrology process
#6 | 2019-06-06Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
#7 | 2018-10-18Method of measuring, device manufacturing method, metrology apparatus, and lithographic system
#8 | 2018-08-02Metrology method, apparatus and computer program
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