Koshi-Shi
Japan
7
2018-08-02
The entities that hold a legal rights for patent applications filed by inventor KOSUGI Hitoshi:
Hitoshi KOSUGI from Koshi-Shi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate liquid treatment apparatus
#2 | 2008-08-28Coating/developing apparatus and pattern forming method
#3 | 2008-05-22Film forming method, film forming apparatus and pattern forming method
#4 | 2008-04-17Edge exposure apparatus, coating and developing apparatus, edge exposure method and coating and developing method, and storage medium
#5 | 2008-02-14Pattern forming method and apparatus
#6 | 2008-02-14Method and system for determining condition of process performed for coating film before immersion light exposure
#7 | 2008-01-24Circulation system for high refractive index liquid in pattern forming apparatus
2260041 ⎘