Andrey Sergeevich TYCHKOV

City:

Eindhoven

Country:

Netherlands

Published Applications:

Last publication date:

2025-01-02

Top Assignees for applications by Andrey Sergeevich TYCHKOV

The entities that hold a legal rights for patent applications filed by inventor TYCHKOV Andrey Sergeevich:

ASML Netherlands B.V. 5 Veldhoven, Netherlands
ASML NETHERLANDS B. V. 1 Veldhoven, Netherlands
Trumpf Lasersystems For Semiconductor Manufacturing GmbH 1 Ditzingen, Germany

Recent patent applications by TYCHKOV Andrey Sergeevich

Andrey Sergeevich TYCHKOV from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2025-01-02

US20250008634A1

Electricity

OPTICAL SYSTEM AND METHOD FOR A RADIATION SOURCE

#2 | 2022-06-30

US20220206397A1

Physics

Laser focussing module

#3 | 2021-06-03

US20210165336A1

Physics

Reflective optical element for a radiation beam

#4 | 2018-08-30

US20180246422A1

Physics

EUV source chamber and gas flow regime for lithographic apparatus, multi-layer mirror and lithographic apparatus

#5 | 2012-08-02

US20120194794A1

Physics

Illumination system, lithographic apparatus and method

InventorID:

2282404 ⎘