San Jose, California
United States
26
2024-06-06
The entities that hold a legal rights for patent applications filed by inventor RASHEED MUHAMMAD:
MUHAMMAD RASHEED from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:
METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD IN A PROCESS CHAMBER
#2 | 2020-10-01Methods and apparatus for reducing sputtering of a grounded shield in a process chamber
#3 | 2019-11-21Multi-zone showerhead
#4 | 2018-03-29Process kit shield for improved particle reduction
#5 | 2018-01-11DEPOSITION RING AND ELECTROSTATIC CHUCK FOR PHYSICAL VAPOR DEPOSITION CHAMBER
#6 | 2017-03-30PROCESS KIT SHIELD AND PHYSICAL VAPOR DEPOSITION CHAMBER HAVING SAME
#7 | 2016-11-24Deposition ring and electrostatic chuck for physical vapor deposition chamber
#8 | 2016-10-06PVD buffer layers for LED fabrication
#9 | 2014-09-18Methods and apparatus for reducing sputtering of a grounded shield in a process chamber
#10 | 2014-09-18PVD target for self-centering process shield
#11 | 2014-09-18Apparatus for gas injection in a physical vapor deposition chamber
#12 | 2014-09-18Method and apparatus for measuring pressure in a physical vapor deposition chamber
#13 | 2014-09-11Target for PVD sputtering system
#14 | 2014-06-12Process kit shield for plasma enhanced processing chamber
#15 | 2013-10-31PVD buffer layers for LED fabrication
#16 | 2013-10-24PROCESS KIT SHIELD AND PHYSICAL VAPOR DEPOSITION CHAMBER HAVING SAME
#17 | 2013-10-03Substrate processing system having symmetric RF distribution and return paths
#18 | 2013-10-03Substrate processing system with mechanically floating target assembly
#19 | 2013-10-03Process kit shield for plasma enhanced processing chamber
#20 | 2013-06-20Apparatus for enabling concentricity of plasma dark space
#21 | 2013-05-09DEPOSITION RING AND ELECTROSTATIC CHUCK FOR PHYSICAL VAPOR DEPOSITION CHAMBER
#22 | 2012-05-03Deposition ring and electrostatic chuck for physical vapor deposition chamber
#23 | 2012-02-02MAGNET FOR PHYSICAL VAPOR DEPOSITION PROCESSES TO PRODUCE THIN FILMS HAVING LOW RESISTIVITY AND NON-UNIFORMITY
#24 | 2011-12-22Magnetron design for RF/DC physical vapor deposition
#25 | 2011-11-17Process kit shield for improved particle reduction
#26 | 2011-10-06Apparatus for physical vapor deposition having centrally fed RF energy
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