Milpitas, California
United States
15
2017-03-09
The entities that hold a legal rights for patent applications filed by inventor Michaelson Timothy:
Timothy Michaelson from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor
#2 | 2016-11-10RESIST HARDENING AND DEVELOPMENT PROCESSES FOR SEMICONDUCTOR DEVICE MANUFACTURING
#3 | 2016-09-22System and method for manufacturing planarized extreme ultraviolet lithography blank
#4 | 2015-10-01Cyclic Spike Anneal Chemical Exposure For Low Thermal Budget Processing
#5 | 2015-06-11Methods of selective layer deposition
#6 | 2014-09-18Vapor deposition deposited photoresist, and manufacturing and lithography systems therefor
#7 | 2014-09-18Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor
#8 | 2014-09-18Resist hardening and development processes for semiconductor device manufacturing
#9 | 2014-08-21Atomic layer deposition of hafnium or zirconium alloy films
#10 | 2013-05-09Dry Etch Processes
#11 | 2013-05-09Atomic Layer Deposition Of Films Using Precursors Containing Hafnium Or Zirconium
#12 | 2012-04-12Atomic layer deposition of photoresist materials and hard mask precursors
#13 | 2012-04-12Radiation patternable CVD film
#14 | 2009-11-05METHODS AND SYSTEMS FOR CONTROLLING CRITICAL DIMENSIONS IN TRACK LITHOGRAPHY TOOLS
#15 | 2008-02-07Methods and systems for controlling critical dimensions in track lithography tools
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