Tokyo
Japan
4
2022-04-28
The entities that hold a legal rights for patent applications filed by inventor MACHIDA Yu:
Yu MACHIDA from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM STORING PROGRAM FOR CAUSING COMPUTER TO EXECUTE METHOD FOR CONTROLLING SUBSTRATE PROCESSING DEVICE
#2 | 2020-02-27SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM STORING PROGRAM FOR CAUSING COMPUTER TO EXECUTE METHOD FOR CONTROLLING SUBSTRATE PROCESSING DEVICE
#3 | 2019-06-20SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM STORING PROGRAM
#4 | 2018-09-27Substrate processing method and apparatus
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