Yasuhiro TOBE

City:

Miyagi

Country:

Japan

Published Applications:

Last publication date:

2019-01-31

Top Assignees for applications by Yasuhiro TOBE

The entities that hold a legal rights for patent applications filed by inventor TOBE Yasuhiro:

Yasuhiro TOBE from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Substrate processing apparatus, and operation method for substrate processing apparatus

Plasma processing apparatus and plasma control method

Substrate processing apparatus and substrate removing method

SUBSTRATE PROCESSING SYSTEM

Vacuum processing apparatus

Plasma processing apparatus, plasma processing method and storage medium

InventorID:

2333212 ⎘