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Inventor profile of:

Ilya MALAKHOVSKY

City:

Eindhoven

Country:

Netherlands

Published Applications:

7

Last publication date:

2025-06-19

Top Assignees for applications by Ilya MALAKHOVSKY

The entities that hold a legal rights for patent applications filed by inventor MALAKHOVSKY Ilya:

ASML Netherlands B.V. 7 Veldhoven, Netherlands
ASML NETHERLANDS B.V. 1 Veldhoven The Netherland, Netherlands

Recent patent applications by MALAKHOVSKY Ilya

Ilya MALAKHOVSKY from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2025-06-19

US20250199421A1

SUBSTRATE WARPAGE DETERMINATION SYSTEM

#2 | 2022-05-19

US20220155675A1

APPARATUS FOR ASSEMBLY OF A RETICLE ASSEMBLY

#3 | 2021-06-03

US20210165335A1

Metrology apparatus

#4 | 2020-07-09

US20200218169A1

Methods and apparatus for use in a device manufacturing method

#5 | 2020-02-13

US20200050117A1

Methods of determining stress in a substrate, control system for controlling a lithographic process, lithographic apparatus and computer program product

#6 | 2019-02-07

US20190041758A1

METHODS OF DETERMINING A MECHANICAL PROPERTY OF A LAYER APPLIED TO A SUBSTRATE, CONTROL SYSTEM FOR A LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC APPARATUS

#7 | 2018-10-25

US20180308740A1

Substrate table and lithographic apparatus

InventorID:

2333216 ⎘