Eindhoven
Netherlands
15
2022-02-17
The entities that hold a legal rights for patent applications filed by inventor PLUG Reinder Teun:
Reinder Teun PLUG from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
METHODS AND APPARATUS FOR ESTIMATING SUBSTRATE SHAPE
#2 | 2021-02-11Guided patterning device inspection
#3 | 2019-08-01METHOD OF PATTERNING AT LEAST A LAYER OF A SEMICONDUCTOR DEVICE
#4 | 2018-11-01Method and apparatus for predicting performance of a metrology system
#5 | 2011-02-24Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrate
#6 | 2009-12-03Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate
#7 | 2008-06-26Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
#8 | 2008-06-19Lithographic apparatus, combination of lithographic apparatus and processing module, and device manufacturing method
#9 | 2008-06-19Lithography system, control system and device manufacturing method
#10 | 2008-02-14Lithography system, control system and device manufacturing method
#11 | 2008-01-03Apparatus for angular-resolved spectroscopic lithography characterization and device manufacturing method
#12 | 2007-12-06Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate
#13 | 2007-12-06Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate
#14 | 2007-08-09Lithographic system, sensor, and method of measuring properties of a substrate
#15 | 2005-03-17Method, apparatus and computer product for substrate processing
2337783 ⎘