Michael J. MARK

City:

San Jose, California

Country:

United States

Published Applications:

Last publication date:

2018-11-29

Top Assignees for applications by Michael J. MARK

The entities that hold a legal rights for patent applications filed by inventor MARK Michael J.:

Michael J. MARK from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:

Measuring concentrations of radicals in semiconductor processing

Apparatus and method for controlling edge performance in an inductively coupled plasma chamber

APPARATUS AND METHOD FOR PROCESSING A SUBSTRATE USING INDUCTIVELY COUPLED PLASMA TECHNOLOGY

InventorID:

2360601 ⎘