Einosuke TSUDA

City:

Nirasaki City

Country:

Japan

Published Applications:

Last publication date:

2026-02-12

Top Assignees for applications by Einosuke TSUDA

The entities that hold a legal rights for patent applications filed by inventor TSUDA Einosuke:

TOKYO ELECTRON LIMITED 6 Tokyo, Japan

Recent patent applications by TSUDA Einosuke

Einosuke TSUDA from Nirasaki City, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-02-12

US20260045457A1

Electricity

ELECTROSTATIC CHUCK AND METHOD OF OPERATION FOR PLASMA PROCESSING

#2 | 2025-02-27

US20250069912A1

Electricity

HEATING DEVICE AND SUBSTRATE PROCESSING APPARATUS

#3 | 2024-10-24

US20240355593A1

Electricity

Electrostatic Chuck and Method of Operation for Plasma Processing

#4 | 2023-03-30

US20230096191A1

Electricity

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

#5 | 2022-01-13

US20220013402A1

Electricity

Stage device and substrate processing apparatus

#6 | 2021-09-30

US20210302846A1

Physics

Substrate stage and substrate processing apparatus

#7 | 2020-09-17

US20200291514A1

Chemistry; metallurgy

Film Forming Apparatus and Film Forming Method

#8 | 2020-07-30

US20200243347A1

Electricity

Method of controlling substrate treatment apparatus, substrate treatment apparatus, and cluster system

#9 | 2019-06-13

US20190180988A1

Electricity

Source material container

#10 | 2018-12-20

US20180366303A1

Electricity

Substrate processing apparatus and substrate loading mechanism

InventorID:

2380418 ⎘