Tempe, Arizona
United States
7
2022-12-01
The entities that hold a legal rights for patent applications filed by inventor Wang Fei:
Fei Wang from Tempe, US has applied for patents for these inventions. The list has both pending applications and granted patents:
APPARATUS AND METHODS FOR SELECTIVELY ETCHING SILICON OXIDE FILMS
#2 | 2022-11-17APPARATUS AND METHOD FOR REMOVAL OF OXIDE AND CARBON FROM SEMICONDUCTOR FILMS IN A SINGLE PROCESSING CHAMBER
#3 | 2022-08-04APPARATUS AND METHODS FOR SELECTIVELY ETCHING FILMS
#4 | 2021-10-14Apparatus and methods for selectively etching silicon oxide films
#5 | 2021-04-22Apparatus and methods for selectively etching films
#6 | 2019-11-14Apparatus for use with hydrogen radicals and method of using same
#7 | 2019-01-17APPARATUS AND METHOD FOR REMOVAL OF OXIDE AND CARBON FROM SEMICONDUCTOR FILMS IN A SINGLE PROCESSING CHAMBER
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