ASM IP Holding B.V.

RF IMPEDANCE MATCHING WITH CONTINUOUS WAVE AND PULSING SOURCES

#2 | 2026-03-26

US20260090302A1

Etch Process and a Processing Assembly

#3 | 2026-03-26

US20260088254A1

ELECTRIC FIELD UNIFORMITY ON DISTRIBUTED ELECTRODE

#4 | 2026-03-26 ✅ Patent 12,595,555 granted on 2026-04-07

US20260085402A1

Toposelective Vapor Deposition Using an Inhibitor

#5 | 2026-03-19

US20260079403A1

PHOTOSENSITIVE MATERIAL AND METHOD OF FORMING PATTERNED STRUCTURES

#6 | 2026-02-26

US20260060014A1

SELECTIVE PASSIVATION AND SELECTIVE DEPOSITION

#7 | 2025-10-02

US20250305117A1

SYNTHESIS AND USE OF PRECURSORS FOR ALD OF MOLYBDENUM OR TUNGSTEN CONTAINING THIN FILMS

#8 | 2025-09-18

US20250293020A1

FORMATION OF SiCN THIN FILMS

#9 | 2025-09-18

US20250291252A1

STRUCTURE INCLUDING A PHOTORESIST UNDERLAYER AND METHOD OF FORMING SAME

#10 | 2025-09-11

US20250283928A1

DETECTING FAILED PULSE FROM RF POWER SOURCE

#11 | 2025-05-15 ✅ Patent 12,628,578 granted on 2026-05-12

US20250157811A1

SUBSTRATE PROCESSING METHOD

#12 | 2025-05-15

US20250154662A1

THERMAL ATOMIC LAYER ETCHING PROCESSES

#13 | 2025-04-17 ✅ Patent 12,546,000 granted on 2026-02-10

US20250122617A1

SUBSTRATE PROCESSING METHOD

#14 | 2025-04-03 ✅ Patent 12,550,664 granted on 2026-02-10

US20250112061A1

STANDARD BASE COMPONENTS FOR FORMING INBOARD AND OUTBOARD SUBSTRATE HANDLING CHAMBERS AND THEIR USE IN PRODUCTION OF SUBSTRATE PROCESSING SYSTEMS WITH EXPANDED PRODUCTION CAPACITY

#15 | 2025-02-25 ✅ Patent 12,237,171 granted on 2025-02-25

US18379228

Method of forming vanadium nitride layer and structure including the vanadium nitride layer

#16 | 2025-01-16 ✅ Patent 12,610,775 granted on 2026-04-21

US20250022729A1

LID MOVING SYSTEMS AND METHODS FOR CHAMBERS AND CONTAINERS

#17 | 2025-01-02 ✅ Patent 12,598,943 granted on 2026-04-07

US20250006529A1

WAFER BOAT SYSTEM, HOLDER RING AND USE THEREOF

#18 | 2025-01-02 ✅ Patent 12,637,765 granted on 2026-05-26

US20250003073A1

METHODS AND APPARATUS FOR A VALVE ASSEMBLY

#19 | 2024-12-26 ✅ Patent 12,553,523 granted on 2026-02-17

US20240426381A1

Mechanical engineering

THERMAL BREAK BETWEEN A SUBSTRATE PROCESSING CHAMBER AND SUBSTRATE HANDLING CHAMBER

#20 | 2024-12-05 ✅ Patent 12,249,501 granted on 2025-03-11

US20240404779A1

Susceptor manufacturing method and the manufactured susceptor using the same

#21 | 2024-10-03 ✅ Patent 12,237,182 granted on 2025-02-25

US20240332039A1

Showerhead device for semiconductor processing system

#22 | 2024-09-12 ✅ Patent 12,449,084 granted on 2025-10-21

US20240301980A1

Mechanical engineering

METHODS AND APPARATUS FOR HEATING A LIQUID

#23 | 2024-09-05 ✅ Patent 12,451,386 granted on 2025-10-21

US20240297063A1

ELECTROSTATIC CHUCK

#24 | 2024-08-22 ✅ Patent 12,442,076 granted on 2025-10-14

US20240279805A1

METHOD AND SYSTEM FOR DEPOSITING NOBLE METAL-CONTAINING LAYER

#25 | 2024-08-22 ✅ Patent 12,509,765 granted on 2025-12-30

US20240279800A1

Method and system for depositing transition metal carbide

#26 | 2024-07-25 ✅ Patent 12,635,475 granted on 2026-05-19

US20240249970A1

VENTED SUSCEPTOR

#27 | 2024-07-11 ✅ Patent 12,644,178 granted on 2026-06-02

US20240229233A1

LAYER DEPOSITION WITH POST-DEPOSITION AGGLOMERATION MITIGATION

#28 | 2024-07-04 ✅ Patent 12,546,008 granted on 2026-02-10

US20240218514A1

PROCESS CHAMBER VOLUME ADJUSTMENT

#29 | 2024-07-04 ✅ Patent 12,624,450 granted on 2026-05-12

US20240218510A1

METHODS FOR FORMING AND UTILIZING ANTIMONY CONTAINING FILMS, AND RELATED STRUCTURES

#30 | 2024-07-04 ✅ Patent 12,577,659 granted on 2026-03-17

US20240218501A1

METHODS AND ASSEMBLIES FOR SELECTIVELY DEPOSITING MOLYBDENUM

#31 | 2024-06-27 ✅ Patent 12,365,984 granted on 2025-07-22

US20240209504A1

TRANSITION METAL DEPOSITION PROCESSES AND DEPOSITION ASSEMBLY

#32 | 2024-06-27 ✅ Patent 12,559,837 granted on 2026-02-24

US20240209499A1

METHOD AND SYSTEM FOR DEPOSITING BORON NITRIDE

#33 | 2024-06-20 ✅ Patent 12,467,137 granted on 2025-11-11

US20240200189A1

Performing operations; transporting

SEMICONDUCTOR PROCESSING DEVICE

#34 | 2024-06-20 ✅ Patent 12,623,359 granted on 2026-05-12

US20240198538A1

END EFFECTOR AND SUBSTRATE PROCESSING APPARATUS INCLUDING END EFFECTOR

#35 | 2024-06-13 ✅ Patent 12,428,723 granted on 2025-09-30

US20240191347A1

METHOD OF FORMING A LAYER COMPRISING MAGNESIUM, ALUMINUM, AND ZINC, AND RELATED SOLIDS AND SYSTEMS

#36 | 2024-06-06 ✅ Patent 12,525,451 granted on 2026-01-13

US20240186138A1

METHODS FOR DEPOSITING AN OXIDE FILM ON A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS AND RELATED DEVICE STRUCTURES

#37 | 2024-05-30 ✅ Patent 12,590,364 granted on 2026-03-31

US20240175124A1

CYCLICAL DEPOSITION METHODS AND STRUCTURES FORMED USING THE METHODS

#38 | 2024-05-23 ✅ Patent 12,467,141 granted on 2025-11-11

US20240167158A1

Performing operations; transporting

INJECTOR CONFIGURED FOR ARRANGEMENT WITHIN A REACTION CHAMBER OF A SUBSTRATE PROCESSING APPARATUS

#39 | 2024-05-23 ✅ Patent 12,472,539 granted on 2025-11-18

US20240165681A1

METHODS AND APPARATUS FOR CLEANING A VESSEL

#40 | 2024-05-16 ✅ Patent 12,272,548 granted on 2025-04-08

US20240162037A1

Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method

#41 | 2024-05-16 ✅ Patent 12,270,118 granted on 2025-04-08

US20240158942A1

Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method

#42 | 2024-05-09 ✅ Patent 12,448,683 granted on 2025-10-21

US20240150892A1

METHOD OF FORMING VANADIUM NITRIDE-CONTAINING LAYER AND STRUCTURE COMPRISING THE SAME

#43 | 2024-04-25 ✅ Patent 12,270,106 granted on 2025-04-08

US20240133035A1

Substrate retaining apparatus, system including the apparatus, and method of using same

#44 | 2024-04-25 ✅ Patent 12,630,924 granted on 2026-05-19

US20240133032A1

TRANSITION METAL DEPOSITION METHOD

#45 | 2024-04-18 ✅ Patent 12,266,540 granted on 2025-04-01

US20240128090A1

Performing operations; transporting

Method for fabricating layer structure having target topological profile

#46 | 2024-04-18 ✅ Patent 12,558,661 granted on 2026-02-24

US20240123416A1

VAPOR DELIVERY APPARATUS, ASSOCIATED VAPOR PHASE REACTOR AND METHODS OF USE

#47 | 2024-04-11 ✅ Patent 12,252,790 granted on 2025-03-18

US20240117494A1

Gapfill methods and processing assemblies

#48 | 2024-04-04 ✅ Patent 12,224,190 granted on 2025-02-11

US20240112934A1

System and apparatus for a valve assembly

#49 | 2024-04-04 ✅ Patent 12,404,583 granted on 2025-09-02

US20240110277A1

TRANSITION METAL NITRIDE DEPOSITION METHOD

#50 | 2024-03-28 ✅ Patent 12,575,376 granted on 2026-03-10

US20240105495A1

SYSTEMS AND APPARATUS FOR A LIFT PIN ASSEMBLY

#51 | 2024-03-28 ✅ Patent 12,624,442 granted on 2026-05-12

US20240102156A1

METHODS FOR PROVIDING A PRECURSOR MIXTURE TO A REACTION CHAMBER

#52 | 2024-03-21 ✅ Patent 12,543,539 granted on 2026-02-03

US20240096685A1

SUBSTRATE HANDLING DEVICE WITH ADJUSTABLE JOINTS

#53 | 2024-03-21 ✅ Patent 12,545,999 granted on 2026-02-10

US20240093363A1

METHOD OF DEPOSITING VANADIUM METAL, STRUCTURE, DEVICE AND A DEPOSITION ASSEMBLY

#54 | 2024-03-07 ✅ Patent 12,571,093 granted on 2026-03-10

US20240076775A1

SELECTIVE DEPOSITION OF SILICON OXIDE ON METAL SURFACES

#55 | 2024-02-29 ✅ Patent 12,635,474 granted on 2026-05-19

US20240071804A1

METHOD, ASSEMBLY AND SYSTEM FOR GAS INJECTION AND CONTROL

#56 | 2024-02-29 ✅ Patent 12,550,638 granted on 2026-02-10

US20240071747A1

SUBSTRATE PROCESSING METHOD

#57 | 2024-02-29 ✅ Patent 12,215,416 granted on 2025-02-04

US20240068092A1

Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film

#58 | 2024-02-08 ✅ Patent 12,272,593 granted on 2025-04-08

US20240047264A1

Cyclical deposition method and apparatus for filling a recess formed within a substrate surface

#59 | 2024-02-08 ✅ Patent 12,568,779 granted on 2026-03-03

US20240047198A1

METHOD OF FORMING TREATED SILICON-CARBON MATERIAL

#60 | 2024-02-08 ✅ Patent 12,322,593 granted on 2025-06-03

US20240047197A1

Selective passivation and selective deposition

#61 | 2024-02-08 ✅ Patent 12,584,857 granted on 2026-03-24

US20240044792A1

METHOD AND APPARATUS FOR TRANSMITTANCE MEASUREMENTS OF LARGE ARTICLES

#62 | 2024-02-08 ✅ Patent 12,416,083 granted on 2025-09-16

US20240044005A1

SUBSTRATE PROCESSING APPARATUS

#63 | 2024-01-25 ✅ Patent 12,094,936 granted on 2024-09-17

US20240030296A1

Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures

#64 | 2024-01-25 ✅ Patent 12,293,942 granted on 2025-05-06

US20240030064A1

Methods for depositing gap filling fluids and related systems and devices

#65 | 2024-01-25 ✅ Patent 12,595,587 granted on 2026-04-07

US20240026567A1

METHOD AND A SUBSTRATE PROCESSING APPARATUS FOR FORMING AN EPITAXIAL STACK ON A PLURALITY OF SUBSTRATES

#66 | 2024-01-25 ✅ Patent 12,312,696 granted on 2025-05-27

US20240026548A1

Thermal atomic layer etching processes

#67 | 2024-01-18 ✅ Patent 12,554,273 granted on 2026-02-17

US20240019879A1

FLOW CONTROL ARRANGEMENTS WITH FLOW SWITCHES, SEMICONDUCTOR PROCESSING SYSTEMS, AND FLOW CONTROL METHODS

#68 | 2024-01-11 ✅ Patent 12,494,361 granted on 2025-12-09

US20240014030A1

METHOD FOR SELECTIVE DEPOSITION OF SILICON NITRIDE AND STRUCTURE INCLUDING SELECTIVELY-DEPOSITED SILICON NITRIDE LAYER

#69 | 2024-01-11 ✅ Patent 12,195,876 granted on 2025-01-14

US20240011189A1

Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly

#70 | 2024-01-11 ✅ Patent 12,571,091 granted on 2026-03-10

US20240011151A1

METHOD FOR FORMING CARBON FILM AND FILM FORMING APPARATUS

#71 | 2024-01-04 ✅ Patent 12,572,164 granted on 2026-03-10

US20240004409A1

DUAL MODEL-BASED TEMPERATURE CONTROLLER

#72 | 2023-12-28 ✅ Patent 12,575,381 granted on 2026-03-10

US20230420309A1

METHOD OF FORMING SILICON WITHIN A GAP ON A SURFACE OF A SUBSTRATE

#73 | 2023-12-28 ✅ Patent 12,119,211 granted on 2024-10-15

US20230420227A1

Substrate processing apparatus

#74 | 2023-12-21 ✅ Patent 12,652,974 granted on 2026-06-09

US20230411147A1

METHODS AND SYSTEMS FOR FORMING A LAYER COMPRISING SILICON OXIDE

#75 | 2023-12-21 ✅ Patent 12,297,540 granted on 2025-05-13

US20230407480A1

Chemical source vessel with dip tube

#76 | 2023-12-21 ✅ Patent 12,637,768 granted on 2026-05-26

US20230407476A1

SELECTIVE DEPOSITION OF MATERIAL COMPRISING NOBLE METAL

#77 | 2023-12-14 ✅ Patent 12,173,400 granted on 2024-12-24

US20230399740A1

Substrate processing device

#78 | 2023-12-07 ✅ Patent 12,183,602 granted on 2024-12-31

US20230395405A1

Substrate processing apparatus for processing substrates

#79 | 2023-11-30 ✅ Patent 12,628,399 granted on 2026-05-12

US20230386846A1

METHODS AND SYSTEMS FOR FORMING A LAYER COMPRISING A GROUP 13 ELEMENT ON A SUBSTRATE

#80 | 2023-11-30 ✅ Patent 12,322,575 granted on 2025-06-03

US20230386792A1

Etching processes and processing assemblies

#81 | 2023-11-30 ✅ Patent 12,320,003 granted on 2025-06-03

US20230383410A1

Substrate processing apparatus including gas diffusion nozzle

#82 | 2023-11-23 ✅ Patent 12,320,012 granted on 2025-06-03

US20230374671A1

Thermal atomic layer etching processes

#83 | 2023-11-16 ✅ Patent 12,293,911 granted on 2025-05-06

US20230369040A1

Structure including SiOCN layer and method of forming same

#84 | 2023-11-09 ✅ Patent 12,283,520 granted on 2025-04-22

US20230360964A1

Selective deposition method to form air gaps

#85 | 2023-11-09 ✅ Patent 12,077,857 granted on 2024-09-03

US20230357925A1

Temperature control assembly for substrate processing apparatus and method of using same

#86 | 2023-11-09 ✅ Patent 12,571,095 granted on 2026-03-10

US20230357924A1

LOW TEMPERATURE FLOWABLE VANADIUM OXIDE GAP FILL

#87 | 2023-11-02 ✅ Patent 12,166,099 granted on 2024-12-10

US20230352556A1

Methods for forming a semiconductor device structure and related semiconductor device structures

#88 | 2023-11-02 ✅ Patent 12,525,480 granted on 2026-01-13

US20230352332A1

ELECTROSTATIC CHUCK PEDESTAL HEATER FOR HIGH BOW WAFERS

#89 | 2023-11-02 ✅ Patent 12,421,620 granted on 2025-09-23

US20230349069A1

STRUCTURES WITH BORON- AND GALLIUM-DOPED SILICON GERMANIUM LAYERS AND METHODS AND SYSTEMS FOR FORMING SAME

#90 | 2023-11-02 ✅ Patent 12,305,281 granted on 2025-05-20

US20230349043A1

Method for forming metal silicon oxide and metal silicon oxynitride layers

#91 | 2023-11-02 ✅ Patent 12,595,557 granted on 2026-04-07

US20230349040A1

METHOD OF FORMING STRUCTURE INCLUDING A DOPED ADHESION FILM

#92 | 2023-10-26 ✅ Patent 12,300,505 granted on 2025-05-13

US20230343601A1

Deposition of organic films

#93 | 2023-10-26 ✅ Patent 12,100,588 granted on 2024-09-24

US20230343587A1

Method of post-deposition treatment for silicon oxide film

#94 | 2023-10-19 ✅ Patent 12,628,581 granted on 2026-05-12

US20230335399A1

SUBSTRATE PROCESSING METHOD

#95 | 2023-10-19 ✅ Patent 11,990,333 granted on 2024-05-21

US20230335397A1

Method and apparatus for filling a gap

#96 | 2023-10-19 ✅ Patent 12,631,358 granted on 2026-05-19

US20230332791A1

Mechanical engineering

INTERFACE MODULE HAVING FAN FILTER UNIT

#97 | 2023-10-05 ✅ Patent 12,024,775 granted on 2024-07-02

US20230313377A1

Gas distribution system and reactor system including same

#98 | 2023-10-05 ✅ Patent 12,540,391 granted on 2026-02-03

US20230313370A1

SOLID SOURCE SUBLIMATOR

#99 | 2023-09-28 ✅ Patent 12,230,506 granted on 2025-02-18

US20230307247A1

Area selective organic material removal

#100 | 2023-09-21 ✅ Patent 12,612,694 granted on 2026-04-28

US20230295795A1