Delft
Netherlands
13
2014-12-25
The entities that hold a legal rights for patent applications filed by inventor Koster Norbertus Benedictus:
Norbertus Benedictus Koster from Delft, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
SURFACE CLEANING DEVICE AND A METHOD OF CLEANING A SURFACE
#2 | 2013-05-23METHOD OF MAKING A SUPPORT STRUCTURE
#3 | 2013-05-16Apparatus and method for reactive ion etching
#4 | 2011-10-13Method and an apparatus for cleaning and/or sterilization of an object provided in a sealed enclosure
#5 | 2011-03-03Ion gauge, a monitoring system and a method for determining a total integrated concentration of substances having specific molecular weight in a gas sample
#6 | 2011-01-20Lithographic apparatus comprising a magnet, method for the protection of a magnet in a lithographic apparatus and device manufacturing method
#7 | 2010-06-17System for Contactless Cleaning, Lithographic Apparatus and Device Manufacturing Method
#8 | 2010-03-11Plasma generator and method for cleaning an object
#9 | 2010-01-14Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system
#10 | 2008-06-19Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element
#11 | 2008-06-05Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system
#12 | 2005-05-26Lithographic projection apparatus, device manufacturing method and device manufactured thereby
#13 | 2005-03-01Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby
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