Mountain View, California
United States
14
2021-07-01
The entities that hold a legal rights for patent applications filed by inventor Rogers Matthew Scott:
Matthew Scott Rogers from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and apparatus for selective nitridation process
#2 | 2019-03-21Method and apparatus for selective nitridation process
#3 | 2018-10-04APPARATUS AND METHOD TO MEASURE TEMPERATURE OF 3D SEMICONDUCTOR STRUCTURES VIA LASER DIFFRACTION
#4 | 2017-11-02Methods for conformal treatment of dielectric films with low thermal budget
#5 | 2016-10-13Apparatus and method for selective oxidation at lower temperature using remote plasma source
#6 | 2014-11-27METHODS AND APPARATUS FOR SELECTIVE OXIDATION OF A SUBSTRATE
#7 | 2014-11-20Method and apparatus for single step selective nitridation
#8 | 2014-10-09Method for conformal treatment of dielectric films using inductively coupled plasma
#9 | 2014-09-18Methods for conformal treatment of dielectric films with low thermal budget
#10 | 2013-05-16Apparatus and method to measure temperature of 3D semiconductor structures via laser diffraction
#11 | 2012-08-16Method and apparatus for multizone plasma generation
#12 | 2012-07-26Plasma treatment of silicon nitride and silicon oxynitride
#13 | 2012-07-26Floating gates and methods of formation
#14 | 2011-09-08Method and apparatus for single step selective nitridation
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