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Inventor profile of:

Wouter Anthon Soer

City:

Nijmegen

Country:

Netherlands

Published Applications:

Last publication date:

2013-05-09

Top Assignees for applications by Wouter Anthon Soer

The entities that hold a legal rights for patent applications filed by inventor Soer Wouter Anthon:

ASML Netherlands B.V. 46 Veldhoven, Netherlands
Koninklijke Philips Electronics, N.V. 6 Eindhoven, Netherlands
CARL ZEISS SMT AG 2 Oberkochen, Germany
Koninklijke Philips Electronics B.V. 1 Eindhoven, Netherlands
ASML Netherlands B.V. 1 Valdhoven, Netherlands
ASML Netherlands B.V. 1 Veldhoven, NL-5504 DR, Netherlands

Recent patent applications by Soer Wouter Anthon

Wouter Anthon Soer from Nijmegen, NL has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2013-05-09

US20130114059A1

Chemistry; metallurgy

Components for EUV Lithographic Apparatus, EUV Lithographic Apparatus Including Such Components and Method for Manufacturing Such Components

#2 | 2013-02-14

US20130038926A1

Physics

Spectral purity filter

#3 | 2013-01-10

US20130010363A1

Physics

Spectral purity filters for use in a lithographic apparatus

#4 | 2013-01-10

US20130010275A1

Physics

LITHOGRAPHIC APPARATUS AND SPECTRAL PURITY FILTER

#5 | 2013-01-01

US12919741

Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby

#6 | 2012-07-19

US20120182537A1

Physics

SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD

#7 | 2012-06-21

US20120154779A1

Physics

SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER

#8 | 2012-06-21

US20120154778A1

Physics

Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter

#9 | 2012-06-14

US20120147351A1

Physics

SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER

#10 | 2012-05-03

US20120105961A1

Physics

Zone plate

#11 | 2011-10-20

US20110257671A1

Human necessities

CONTACT DETECTION TUBES, METHODS AND SYSTEMS FOR MEDICAL PROCEDURES

#12 | 2011-09-01

US20110211185A1

Physics

Spectral purity filter, radiation source, lithographic apparatus, and device manufacturing method

#13 | 2011-07-07

US20110164237A1

Physics

Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter

#14 | 2011-06-30

US20110157573A1

Physics

SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS INCLUDING SUCH A SPECTRAL PURITY FILTER AND DEVICE MANUFACTURING METHOD

#15 | 2011-06-23

US20110149262A1

Physics

Spectral purity filter and lithographic apparatus

#16 | 2011-06-09

US20110134405A1

Electricity

Radiation source, lithographic apparatus and device manufacturing method

#17 | 2011-06-02

US20110128519A1

Electricity

Radiation source

#18 | 2011-05-12

US20110109892A1

Physics

Source module of an EUV lithographic apparatus, lithographic apparatus, and method for manufacturing a device

#19 | 2011-02-24

US20110044425A1

Physics

SPECTRAL PURITY FILTERS FOR USE IN A LITHOGRAPHIC APPARATUS

#20 | 2011-02-24

US20110043782A1

Physics

SPECTRAL PURITY FILTERS FOR USE IN A LITHOGRAPHIC APPARATUS

#21 | 2011-01-13

US20110007292A1

Physics

Lithographic apparatus, plasma source, and reflecting method

#22 | 2011-01-13

US20110007289A1

Electricity

DEVICE CONSTRUCTED AND ARRANGED TO GENERATE RADIATION, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD

#23 | 2010-12-30

US20100328639A1

Physics

SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER

#24 | 2010-10-28

US20100271610A1

Physics

LITHOGRAPHIC RADIATION SOURCE, COLLECTOR, APPARATUS AND METHOD

#25 | 2010-10-14

US20100259744A1

Physics

SPECTRAL FILTER, LITHOGRAPHIC APPARATUS INCLUDING SUCH A SPECTRAL FILTER, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY

#26 | 2010-07-22

US20100181502A1

Physics

Self-shading electrodes for debris suppression in an EUV source

#27 | 2010-06-10

US20100141909A1

Physics

RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS

#28 | 2010-02-18

US20100039632A1

Physics

RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

#29 | 2010-01-28

US20100020304A1

Physics

Spectral purity filters for use in a lithographic apparatus

#30 | 2010-01-07

US20100002216A1

Physics

Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby

#31 | 2009-12-17

US20090309048A1

Physics

Radiation system and lithographic apparatus comprising the same

#32 | 2009-11-19

US20090284725A1

Physics

Lithographic apparatus

#33 | 2009-11-05

US20090272917A1

Physics

Radiation source and lithographic apparatus including a contamination trap

#34 | 2009-11-05

US20090272916A1

Physics

Radiation source and lithographic apparatus

#35 | 2009-07-09

US20090173360A1

Physics

Lithographic apparatus, and device manufacturing method

#36 | 2009-03-19

US20090074962A1

Chemistry; metallurgy

Method for the protection of an optical element of a lithographic apparatus and device manufacturing method

#37 | 2009-01-29

US20090027637A1

Physics

Debris prevention system and lithographic apparatus

#38 | 2009-01-29

US20090025750A1

Physics

Method for removal of a deposition from an optical element, lithographic apparatus, and method for manufacturing a device

#39 | 2009-01-22

US20090021705A1

Physics

Debris prevention system, radiation system, and lithographic apparatus

#40 | 2009-01-01

US20090001288A1

Physics

Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method

#41 | 2008-11-27

US20080291406A1

Physics

Assembly comprising a radiation source, a reflector and a contaminant barrier

#42 | 2008-11-13

US20080277599A1

Electricity

Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby

#43 | 2008-11-06

US20080273188A1

Physics

Device arranged to measure a quantity relating to radiation and lithographic apparatus

#44 | 2008-07-03

US20080159471A1

Electricity

Debris mitigation system and lithographic apparatus

#45 | 2008-07-03

US20080157006A1

Physics

Debris mitigation system and lithographic apparatus

#46 | 2008-06-26

US20080151215A1

Physics

Patterning device, method of providing a patterning device, photolithographic apparatus and device manufacturing method

#47 | 2008-06-19

US20080142736A1

Physics

Radiation system and lithographic apparatus

#48 | 2008-04-10

US20080083885A1

Physics

Lithographic apparatus, and device manufacturing method

#49 | 2008-03-27

US20080074655A1

Physics

Radiation system and lithographic apparatus comprising the same

InventorID:

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