Eindhoven
Netherlands
25
2018-09-13
The entities that hold a legal rights for patent applications filed by inventor Yakunin Andrei Mikhailovich:
Andrei Mikhailovich Yakunin from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Graphene spectral purity filter
#2 | 2017-02-23Lithographic system
#3 | 2017-01-19Pellicle for reticle and multilayer mirror
#4 | 2014-06-12Pellicle for reticle and multilayer mirror
#5 | 2013-04-11Lithographic apparatus and method
#6 | 2013-03-21SYSTEM FOR REMOVING CONTAMINANT PARTICLES, LITHOGRAPHIC APPARATUS, METHOD FOR REMOVING CONTAMINANT PARTICLES AND METHOD FOR MANUFACTURING A DEVICE
#7 | 2013-03-07Multilayer mirror
#8 | 2013-02-14Spectral purity filter
#9 | 2013-01-17EUV Radiation Source and EUV Radiation Generation Method
#10 | 2013-01-10LITHOGRAPHIC APPARATUS AND SPECTRAL PURITY FILTER
#11 | 2013-01-01Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby
#12 | 2012-12-27Radiation Source, Lithographic Apparatus and Device Manufacturing Method
#13 | 2012-07-05SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER AND METHOD OF MANUFACTURING A DEVICE USING LITHOGRAPHIC APPARATUS
#14 | 2011-09-22Mirror, lithographic apparatus and device manufacturing method
#15 | 2011-09-22Imprint lithography
#16 | 2011-09-15Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device
#17 | 2011-09-01Spectral purity filter, radiation source, lithographic apparatus, and device manufacturing method
#18 | 2011-07-14Lithographic Apparatus and Device Manufacturing Method
#19 | 2011-07-07Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter
#20 | 2011-07-07Radiation source and lithographic apparatus
#21 | 2011-06-16Radiation source, lithographic apparatus, and device manufacturing method
#22 | 2011-05-12Source module of an EUV lithographic apparatus, lithographic apparatus, and method for manufacturing a device
#23 | 2011-02-24SPECTRAL PURITY FILTERS FOR USE IN A LITHOGRAPHIC APPARATUS
#24 | 2011-01-20Radiation system and lithographic apparatus
#25 | 2010-12-30SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER
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