Busan
South Korea
7
2019-03-14
The entities that hold a legal rights for patent applications filed by inventor LIM Kwon Taek:
Kwon Taek LIM from Busan, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate cleaning composition, substrate treating method, and substrate treating apparatus
#2 | 2012-08-02Method and apparatus for etching the silicon oxide layer of a semiconductor substrate
#3 | 2012-04-12Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
#4 | 2012-04-05Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
#5 | 2011-05-19METHOD AND SYSTEM FOR ETCHING A SILICON DIOXIDE FILM USING DENSIFIED CARBON DIOXIDE
#6 | 2009-11-26ULTRASONIC CLEANING SYSTEM FOR REMOVING HIGH DOSE ION IMPLANTED PHOTORESIST IN SUPERCRITICAL CARBON DIOXIDE
#7 | 2007-12-20Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
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