Eindhoven
Netherlands
14
2023-06-01
The entities that hold a legal rights for patent applications filed by inventor KOU Weitian:
Weitian KOU from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of wafer alignment using at resolution metrology on product features
#2 | 2023-06-01Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
#3 | 2022-11-17COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL
#4 | 2022-07-21Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
#5 | 2021-11-11Method and apparatus for optimization of lithographic process
#6 | 2021-03-18Computational metrology based correction and control
#7 | 2021-03-18Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
#8 | 2020-08-27Lithographic method
#9 | 2020-03-12Lithographic method
#10 | 2020-02-13METHODS & APPARATUS FOR CONTROLLING AN INDUSTRIAL PROCESS
#11 | 2020-01-23Method and apparatus for optimization of lithographic process
#12 | 2020-01-16Methods of determining corrections for a patterning process
#13 | 2019-03-28Lithographic method
#14 | 2018-10-25Method and apparatus for controlling an industrial process using product grouping
2466393 ⎘