Sunnyvale, California
United States
13
2020-03-19
The entities that hold a legal rights for patent applications filed by inventor Chen Hung:
Hung Chen from Sunnyvale, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Chemical mechanical polishing apparatus and methods
#2 | 2017-10-19Chemical mechanical polishing apparatus and methods
#3 | 2015-11-26Conditioning of grooving in polishing pads
#4 | 2015-01-22CHEMICAL MECHANICAL POLISHING RETAINING RING METHODS AND APPARATUS
#5 | 2014-10-23Multi-disk chemical mechanical polishing pad conditioners and methods
#6 | 2014-10-16METHODS AND APPARATUS FOR A NON-CONTACT EDGE POLISHING MODULE USING ION MILLING
#7 | 2014-07-17CHEMICAL MECHANICAL POLISHING APPARATUS AND METHODS
#8 | 2013-10-31Methods and apparatus for pre-chemical mechanical planarization buffing module
#9 | 2013-10-31METHODS AND APPARATUS FOR ACTIVE SUBSTRATE PRECESSION DURING CHEMICAL MECHANICAL POLISHING
#10 | 2013-10-31High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods
#11 | 2013-10-31ANTI-SLIP SCRUBBER BRUSH AND ASSEMBLY METHODS
#12 | 2013-05-16Systems and methods for substrate polishing end point detection using improved friction measurement
#13 | 2013-05-16Systems and methods for substrate polishing end point detection using improved friction measurement
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