Weert
Netherlands
3
2020-04-16
The entities that hold a legal rights for patent applications filed by inventor Brouwer Eric Jos Anton:
Eric Jos Anton Brouwer from Weert, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
#2 | 2020-01-23Metrology apparatus and method for determining a characteristic relating to one or more structures on a substrate
#3 | 2019-06-06Measurement method, inspection apparatus, patterning device, lithographic system and device manufacturing method
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