Eindhoven
Netherlands
20
2026-04-23
The entities that hold a legal rights for patent applications filed by inventor ROY Sarathi:
Sarathi ROY from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
DETERMINING A CORRECTION TO A PROCESS
#2 | 2024-11-14COMPUTATIONAL METROLOGY BASED SAMPLING SCHEME
#3 | 2024-10-17DETERMINING A CORRECTION TO A PROCESS
#4 | 2024-09-19METHOD OF DETERMINING A CORRECTION FOR AT LEAST ONE CONTROL PARAMETER IN A SEMICONDUCTOR MANUFACTURING PROCESS
#5 | 2024-06-06CAUSAL CONVOLUTION NETWORK FOR PROCESS CONTROL
#6 | 2023-08-17METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES
#7 | 2023-07-13Computational metrology based sampling scheme
#8 | 2023-06-08METHOD FOR OPTIMIZING A SAMPLING SCHEME AND ASSOCIATED APPARATUSES
#9 | 2022-11-17COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL
#10 | 2022-10-20Determining lithographic matching performance
#11 | 2022-03-24METHODS AND APPARATUS FOR CONTROLLING A LITHOGRAPHIC PROCESS
#12 | 2022-01-06Optimizing an apparatus for multi-stage processing of product units
#13 | 2021-10-28Determining a correction to a process
#14 | 2021-08-19Methods using fingerprint and evolution analysis
#15 | 2021-06-03Determining a correction to a process
#16 | 2021-03-18Computational metrology based correction and control
#17 | 2020-11-26Computational metrology based sampling scheme
#18 | 2020-07-23Optimizing an apparatus for multi-stage processing of product units
#19 | 2020-04-23Method and apparatus for detecting substrate surface variations
#20 | 2019-07-11Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method
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