Milpitas, California
United States
10
2023-12-21
The entities that hold a legal rights for patent applications filed by inventor TJANDRA Agus Sofian:
Agus Sofian TJANDRA from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSING VOLUME OF A PROCESSING CHAMBER
#2 | 2021-09-02Dogbone inlet cone profile for remote plasma oxidation chamber
#3 | 2021-03-11Side inject designs for improved radical concentrations
#4 | 2021-02-11Gas injection apparatus with heating channels
#5 | 2020-07-09Dogbone inlet cone profile for remote plasma oxidation chamber
#6 | 2020-06-25Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber
#7 | 2020-02-06Side inject nozzle design for processing chamber
#8 | 2019-09-26METHOD AND APPARATUS FOR PROVIDING RADICAL SPECIES TO A PROCESSING VOLUME OF A PROCESSING CHAMBER
#9 | 2019-07-25Dogbone inlet cone profile for remote plasma oxidation chamber
#10 | 2018-12-06Remote plasma oxidation chamber
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