Milpitas, California
United States
8
2022-12-22
The entities that hold a legal rights for patent applications filed by inventor MA Jun:
Jun MA from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:
GROUND PATH SYSTEMS FOR PROVIDING A SHORTER AND SYMMETRICAL GROUND PATH
#2 | 2022-06-09SEMICONDUCTOR PROCESSING APPARATUS FOR HIGH RF POWER PROCESS
#3 | 2022-06-02MULTI-ZONE HEATER TUNING IN SUBSTRATE HEATER
#4 | 2021-06-03Chamber deposition and etch process
#5 | 2020-01-09SEMICONDUCTOR PROCESSING APPARATUS FOR HIGH RF POWER PROCESS
#6 | 2019-11-28Ground path systems for providing a shorter and symmetrical ground path
#7 | 2019-11-21High temperature electrostatic chuck
#8 | 2019-08-15Semiconductor processing apparatus having improved temperature control
2588278 ⎘