Tempe, Arizona
United States
17
2026-04-09
The entities that hold a legal rights for patent applications filed by inventor Su Junwei:
Junwei Su from Tempe, US has applied for patents for these inventions. The list has both pending applications and granted patents:
APPARATUS AND METHODS FOR COOLING REACTION CHAMBERS IN SEMICONDUCTOR PROCESSING SYSTEMS
#2 | 2025-12-25WAFER FAR EDGE TEMPERATURE MEASUREMENT SYSTEM WITH LAMP BANK ALIGNMENT
#3 | 2024-04-04LIFT PIN ACTUATORS FOR SEMICONDUCTOR PROCESSING SYSTEMS AND RELATED METHODS
#4 | 2024-04-04SYSTEMS AND METHODS FOR MONITORING A CONDITION OF LAMPS USED IN SEMICONDUCTOR FABRICATION PROCESSING
#5 | 2023-11-30SUBSTRATE SUPPORTS, SEMICONDUCTOR PROCESSING SYSTEMS, AND MATERIAL LAYER DEPOSITION METHODS
#6 | 2023-10-05Gas distribution system and reactor system including same
#7 | 2023-04-13SYSTEMS AND METHODS FOR PURGING REACTOR LOWER CHAMBERS WITH ETCHANTS DURING FILM DEPOSITION
#8 | 2023-01-05Semiconductor deposition reactor and components for reduced quartz devitrification
#9 | 2022-12-29APPARATUS AND METHODS FOR COOLING REACTION CHAMBERS IN SEMICONDUCTOR PROCESSING SYSTEMS
#10 | 2022-11-03SUSCEPTORS WITH FILM DEPOSITION CONTROL FEATURES
#11 | 2022-09-22WAFER FAR EDGE TEMPERATURE MEASUREMENT SYSTEM WITH LAMP BANK ALIGNMENT
#12 | 2022-09-22WAFER TEMPERATURE GRADIENT CONTROL TO SUPPRESS SLIP FORMATION IN HIGH-TEMPERATURE EPITAXIAL FILM GROWTH
#13 | 2021-10-07MULTI-PORT GAS INJECTION SYSTEM AND REACTOR SYSTEM INCLUDING SAME
#14 | 2020-07-16Temperature-controlled flange and reactor system including same
#15 | 2020-02-06Multi-port gas injection system and reactor system including same
#16 | 2020-01-02Temperature-controlled flange and reactor system including same
#17 | 2019-12-05Gas distribution system and reactor system including same
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