Tokyo
Japan
7
2023-08-10
The entities that hold a legal rights for patent applications filed by inventor Utsuno Mitsuya:
Mitsuya Utsuno from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD OF FORMING STRUCTURES USING A NEUTRAL BEAM, STRUCTURES FORMED USING THE METHOD AND REACTOR SYSTEM FOR PERFORMING THE METHOD
#2 | 2021-07-22METHOD OF FORMING HIGH ASPECT RATIO FEATURES
#3 | 2021-05-20Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure
#4 | 2021-01-21Method of forming structures using a neutral beam
#5 | 2020-11-19Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
#6 | 2020-04-16Method for etching a carbon-containing feature
#7 | 2020-01-09Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
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