Iwate
Japan
3
2014-11-27
The entities that hold a legal rights for patent applications filed by inventor KIKUCHI Hitoshi:
Hitoshi KIKUCHI from Iwate, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE EJECTION DETECTION DEVICE, METHOD OF DETECTING SUBSTRATE EJECTION AND SUBSTRATE PROCESSING APPARATUS
#2 | 2013-05-23Temperature measurement apparatus, method of estimating temperature profile, recording medium and heat treatment apparatus
#3 | 2012-11-29Temperature measurement apparatus, method of measuring temperature profile, recording medium and heat treatment apparatus
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