Georgetown, Massachusetts
United States
23
2026-06-18
The entities that hold a legal rights for patent applications filed by inventor Hermanson Eric D.:
Eric D. Hermanson from Georgetown, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Patterned DLC Coating for High Temperature Electrostatic Chucks
#2 | 2024-03-14MANAGING BEAM POWER EFFECTS BY VARYING BASE EMISSIVITY
#3 | 2023-09-07Cover ring to mitigate carbon contamination in plasma doping chamber
#4 | 2023-06-15System using pixelated faraday sensor
#5 | 2022-02-03Particle yield via beam-line pressure control
#6 | 2021-06-17Electrostatic filter providing reduced particle generation
#7 | 2021-01-21High-current ion implanter and method for controlling ion beam using high-current ion implanter
#8 | 2020-09-17Dual cathode ion source
#9 | 2020-05-21Electrostatic filter and ion implanter having asymmetric electrostatic configuration
#10 | 2020-03-12Foam in ion implantation system
#11 | 2020-03-12Foam in ion implantation system
#12 | 2019-12-19Dual cathode ion source
#13 | 2019-08-22Conductive beam optic containing internal heating element
#14 | 2019-06-27Ion beam quality control using a movable mass resolving device
#15 | 2018-07-26Dual cathode ion source
#16 | 2018-05-22Dual cathode ion source
#17 | 2016-09-22Cryopump arrangement for improved pump speed
#18 | 2016-03-10Linkage conduit for vacuum chamber applications
#19 | 2013-05-23Techniques for protecting a superconducting (SC) tape
#20 | 2012-01-05Deceleration lens
#21 | 2007-06-07Techniques for reducing effects of photoresist outgassing
#22 | 2007-06-07Techniques for preventing parasitic beamlets from affecting ion implantation
#23 | 2006-10-05Methods and apparatus for ion beam angle measurement in two dimensions
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