Waalre
Netherlands
3
2022-02-17
The entities that hold a legal rights for patent applications filed by inventor VAN SETTEN Eelco:
Eelco VAN SETTEN from Waalre, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for high numerical aperture thru-slit source mask optimization
#2 | 2020-08-20Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
#3 | 2020-03-26Patterning device
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