Eindhoven
Netherlands
64
2024-12-12
The entities that hold a legal rights for patent applications filed by inventor STAALS Frank:
Frank STAALS from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Metrology Apparatus And Method For Determining A Characteristic Of One Or More Structures On A Substrate
#2 | 2024-01-11Method of determining control parameters of a device manufacturing process
#3 | 2024-01-04METHOD AND SYSTEM TO MONITOR A PROCESS APPARATUS
#4 | 2023-09-28METHODS AND PATTERNING DEVICES AND APPARATUSES FOR MEASURING FOCUS PERFORMANCE OF A LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD
#5 | 2023-05-25Wavefront optimization for tuning scanner based on performance matching
#6 | 2023-02-23Method of determining control parameters of a device manufacturing process
#7 | 2023-02-09SEPARATION OF CONTRIBUTIONS TO METROLOGY DATA
#8 | 2023-01-19Method for controlling a lithographic apparatus and associated apparatuses
#9 | 2022-11-10METHOD FOR INFERRING A PROCESSING PARAMETER SUCH AS FOCUS AND ASSOCIATED APPARATUSES AND MANUFACTURING METHOD
#10 | 2022-10-27METHOD FOR DETERMINING CONTRIBUTION TO A FINGERPRINT
#11 | 2022-05-12Method for controlling a lithographic apparatus and associated apparatuses
#12 | 2022-03-24Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
#13 | 2021-11-25Wavefront optimization for tuning scanner based on performance matching
#14 | 2021-11-11COMPUTATIONAL METROLOGY
#15 | 2021-05-20Method of determining control parameters of a device manufacturing process
#16 | 2021-04-01Control method for a scanning exposure apparatus
#17 | 2021-01-21Methods and apparatus for monitoring a lithographic manufacturing process
#18 | 2021-01-07Method for determining contribution to a fingerprint
#19 | 2020-11-12Method for optimization of a lithographic process
#20 | 2020-11-05Method for controlling a lithographic apparatus and associated apparatuses
#21 | 2020-08-20Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
#22 | 2020-08-06Computational metrology
#23 | 2020-07-23Method and apparatus for determining a fingerprint of a performance parameter
#24 | 2020-05-21Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
#25 | 2020-05-07Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
#26 | 2020-04-23Method and system to monitor a process apparatus
#27 | 2020-01-23Metrology apparatus and method for determining a characteristic relating to one or more structures on a substrate
#28 | 2020-01-02Methods and apparatus for monitoring a lithographic manufacturing process
#29 | 2019-12-12Metrology apparatus and method for determining a characteristic of one or more structures on a substrate
#30 | 2019-12-12Metrology robustness based on through-wavelength similarity
#31 | 2019-10-24Method and apparatus for determining a fingerprint of a performance parameter
#32 | 2019-10-17Method for optimization of a lithographic process
#33 | 2019-09-05Method for determining contribution to a fingerprint
#34 | 2019-08-08Level sensor apparatus, method of measuring topographical variation across a substrate, method of measuring variation of a physical parameter related to a lithographic process, and lithographic apparatus
#35 | 2019-06-27Method and system to monitor a process apparatus
#36 | 2019-06-06Measurement method, inspection apparatus, patterning device, lithographic system and device manufacturing method
#37 | 2019-05-02Metrology robustness based on through-wavelength similarity
#38 | 2019-03-21Separation of contributions to metrology data
#39 | 2019-02-21Method of calibrating focus measurements, measurement method and metrology apparatus, lithographic system and device manufacturing method
#40 | 2018-08-09Process window tracker
#41 | 2018-01-11Method and apparatus for reticle optimization
#42 | 2017-06-08Method for determining a process window for a lithographic process, associated apparatuses and a computer program
#43 | 2017-06-01Metrology target, method and apparatus, computer program and lithographic system
#44 | 2017-01-26Inspection apparatus, inspection method, lithographic apparatus and manufacturing method
#45 | 2016-12-22Lithographic apparatus with data processing apparatus
#46 | 2016-12-22Method of metrology, inspection apparatus, lithographic system and device manufacturing method
#47 | 2016-04-21Lithographic apparatus
#48 | 2014-01-23Lithographic apparatus
#49 | 2013-06-06Lithographic method and apparatus
#50 | 2012-09-27Lithographic apparatus
#51 | 2012-01-19Lithographic apparatus and device manufacturing method involving a level sensor having multiple projection units and detection units
#52 | 2011-08-18Calculating a laser metric within a lithographic apparatus and method thereof
#53 | 2011-07-07Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate
#54 | 2011-06-23Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program product
#55 | 2010-08-05Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor
#56 | 2009-10-29Method of measuring a lithographic projection apparatus
#57 | 2009-10-22Method and Lithographic Apparatus for Acquiring Height Data Relating to a Substrate Surface
#58 | 2009-10-15Lithographic apparatus and device manufacturing method
#59 | 2009-09-17Method and lithographic apparatus for measuring and acquiring height data relating to a substrate surface
#60 | 2009-08-13Method for determining exposure settings, lithographic exposure apparatus, computer program and data carrier
#61 | 2009-06-18Lithographic apparatus with adjusted exposure slit shape enabling reduction of focus errors due to substrate topology and device manufacturing method
#62 | 2008-11-06Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus
#63 | 2006-06-29Level sensor, lithographic apparatus and device manufacturing method
#64 | 2005-02-10Lithographic apparatus, device manufacturing method, and device manufactured thereby
272086 ⎘