Stuttgart
Germany
17
2023-01-19
The entities that hold a legal rights for patent applications filed by inventor Laufer Timo:
Timo Laufer from Stuttgart, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Device for detecting a temperature, installation for producing an optical element and method for producing an optical element
#2 | 2023-01-12Projection exposure apparatus for semiconductor lithography
#3 | 2022-09-29Method for avoiding a degradation of an optical element, projection system, illumination system and projection exposure apparatus
#4 | 2021-09-16Method for temperature control of a component
#5 | 2020-07-23Method for temperature control of a component
#6 | 2020-07-09Method for determining properties of an EUV source
#7 | 2019-10-10EUV exposure apparatus with reflective elements having reduced influence of temperature variation
#8 | 2019-07-18Projection exposure apparatus for semiconductor lithography with increased thermal robustness
#9 | 2018-10-18EUV exposure apparatus with reflective elements having reduced influence of temperature variation
#10 | 2017-11-02EUV exposure apparatus with reflective elements having reduced influence of temperature variation
#11 | 2016-07-07EUV exposure apparatus with reflective elements having reduced influence of temperature variation
#12 | 2015-12-03Optical arrangement in an optical system, in particular in a microlithographic projection exposure apparatus
#13 | 2013-12-26Lithography apparatus
#14 | 2013-06-06EUV exposure apparatus with reflective elements having reduced influence of temperature variation
#15 | 2012-06-21Optical arrangement in an optical system, in particular in a microlithographic projection exposure apparatus
#16 | 2011-09-08Protection module for EUV lithography apparatus, and EUV lithography apparatus
#17 | 2011-07-28Temperature-control device for an optical assembly
272091 ⎘