Eindhoven
Netherlands
5
2019-10-10
The entities that hold a legal rights for patent applications filed by inventor Van Schoot Jan:
Jan Van Schoot from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
#2 | 2018-10-18EUV exposure apparatus with reflective elements having reduced influence of temperature variation
#3 | 2017-11-02EUV exposure apparatus with reflective elements having reduced influence of temperature variation
#4 | 2016-07-07EUV exposure apparatus with reflective elements having reduced influence of temperature variation
#5 | 2013-06-06EUV exposure apparatus with reflective elements having reduced influence of temperature variation
272096 ⎘