David DECKERS

City:

Schilde

Country:

Belgium

Published Applications:

Last publication date:

2015-09-17

Top Assignees for applications by David DECKERS

The entities that hold a legal rights for patent applications filed by inventor DECKERS David:

David DECKERS from Schilde, BE has applied for patents for these inventions. The list has both pending applications and granted patents:

Alignment measurement system, lithographic apparatus, and a method to determine alignment of in a lithographic apparatus

Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus

Measuring method, apparatus and substrate

Alignment measurement system, lithographic apparatus, and a method to determine alignment in a lithographic apparatus

Alignment mark, substrate, set of patterning devices, and device manufacturing method

PRODUCTION OF AN ALIGNMENT MARK

InventorID:

272132 ⎘