Sunghyun PARK

City:

Daegu

Country:

South Korea

Published Applications:

Last publication date:

2023-03-16

Top Assignees for applications by Sunghyun PARK

The entities that hold a legal rights for patent applications filed by inventor PARK Sunghyun:

Sunghyun PARK from Daegu, KR has applied for patents for these inventions. The list has both pending applications and granted patents:

Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid

Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid

Substrate heating apparatus and method for processing a substrate

Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system

InventorID:

2732969 ⎘