Su-Ting CHENG

City:

Eindhoven

Country:

Netherlands

Published Applications:

Last publication date:

2026-03-12

Top Assignees for applications by Su-Ting CHENG

The entities that hold a legal rights for patent applications filed by inventor CHENG Su-Ting:

Su-Ting CHENG from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:

LITHOGRAPHIC APPARATUS, METROLOGY SYSTEMS FOR CONTROLLING OPTICAL ABERRATIONS, AND METHOD THEREOF

METROLOGY METHOD AND ASSOCIATED METROLOGY DEVICE

Method of measuring a parameter of a patterning process, metrology apparatus, target

Metrology method and apparatus, computer program and lithographic system

InventorID:

2766594 ⎘