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Inventor profile of:

Ryutaro SUDA

City:

Miyagi

Country:

Japan

Published Applications:

Last publication date:

2026-06-04

Top Assignees for applications by Ryutaro SUDA

The entities that hold a legal rights for patent applications filed by inventor SUDA Ryutaro:

TOKYO ELECTRON LIMITED 34 Tokyo, Japan

Recent patent applications by SUDA Ryutaro

Ryutaro SUDA from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-06-04

US20260153796A1

Physics

ETCHING METHOD AND PLASMA PROCESSING SYSTEM

#2 | 2026-03-26

US20260090300A1

Electricity

ETCHING METHOD AND ETCHING APPARATUS

#3 | 2026-03-19

US20260081116A1

Electricity

TEMPERATURE CONTROL SYSTEM AND METHOD OF CONTROLLING TEMPERATURE CONTROL SYSTEM

#4 | 2026-03-12

US20260074157A1

Electricity

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

#5 | 2025-10-16

US20250323055A1

Electricity

ETCHING METHOD

#6 | 2025-06-12

US20250191889A1

Electricity

PLASMA PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM

#7 | 2025-02-06

US20250046615A1

Electricity

ETCHING METHOD

#8 | 2024-02-29

US20240071723A1

Electricity

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

#9 | 2024-02-01

US20240038494A1

Electricity

ETCHING METHOD AND ETCHING APPARATUS

#10 | 2023-08-24

US20230268191A1

Electricity

ETCHING METHOD

#11 | 2023-08-10

US20230251567A1

Physics

ETCHING METHOD AND PLASMA PROCESSING SYSTEM

#12 | 2023-07-13

US20230223249A1

Electricity

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#13 | 2023-07-06

US20230215700A1

Electricity

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#14 | 2023-07-06

US20230215691A1

Electricity

ETCHING METHOD AND ETCHING APPARATUS

#15 | 2023-06-29

US20230207343A1

Electricity

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

#16 | 2023-06-22

US20230197458A1

Electricity

Etching method

#17 | 2022-12-08

US20220389584A1

Chemistry; metallurgy

SHOWER HEAD, ELECTRODE UNIT, GAS SUPPLY UNIT, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM

#18 | 2022-11-17

US20220367202A1

Electricity

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#19 | 2022-11-10

US20220359167A1

Electricity

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#20 | 2022-09-08

US20220285169A1

Electricity

SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

#21 | 2022-08-04

US20220246443A1

Electricity

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#22 | 2022-06-23

US20220199412A1

Electricity

Etching method

#23 | 2022-05-19

US20220157616A1

Electricity

Substrate processing method and substrate processing system

#24 | 2022-05-19

US20220157610A1

Electricity

Etching method

#25 | 2022-05-12

US20220148884A1

Electricity

Etching method

#26 | 2022-03-24

US20220093367A1

Electricity

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

#27 | 2022-02-17

US20220051899A1

Electricity

ETCHING METHOD AND ETCHING APPARATUS

#28 | 2021-12-02

US20210375633A1

Electricity

Method and apparatus for formation of protective sidewall layer for bow reduction

#29 | 2021-11-04

US20210343539A1

Electricity

SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

#30 | 2021-07-01

US20210202261A1

Electricity

Etching method and etching apparatus

#31 | 2021-05-27

US20210159089A1

Electricity

Substrate processing method and substrate processing apparatus

#32 | 2021-05-27

US20210159085A1

Electricity

Substrate processing method and plasma processing apparatus

#33 | 2021-05-13

US20210143028A1

Electricity

Etching method and plasma processing apparatus

#34 | 2021-05-13

US20210143016A1

Electricity

Etching method

#35 | 2020-07-23

US20200234963A1

Electricity

Etching method and etching apparatus

InventorID:

2802576 ⎘