Milpitas, California
United States
15
2026-04-16
The entities that hold a legal rights for patent applications filed by inventor RAMALINGAM Jothilingam:
Jothilingam RAMALINGAM from Milpitas, US has applied for patents for these inventions. The list has both pending applications and granted patents:
DRY CHAMBER CLEAN USING THERMAL AND PLASMA PROCESSES
#2 | 2024-03-28METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION (PVD) DIELECTRIC DEPOSITION
#3 | 2023-10-19Method and chamber for backside physical vapor deposition
#4 | 2023-04-13Dose reduction of patterned metal oxide photoresists
#5 | 2022-12-29Method and chamber for backside physical vapor deposition
#6 | 2022-10-27Apparatus for reducing tungsten resistivity
#7 | 2022-09-29Methods and apparatus for passivating a target
#8 | 2022-09-22Methods of reducing particles in a physical vapor deposition (PVD) chamber
#9 | 2022-03-17Methods and apparatus for reducing tungsten resistivity
#10 | 2021-10-14Methods and apparatus for passivating a target
#11 | 2021-03-04Method and chamber for backside physical vapor deposition
#12 | 2021-02-18Methods and apparatus for physical vapor deposition (PVD) dielectric deposition
#13 | 2021-02-04Dose reduction of patterned metal oxide photoresists
#14 | 2020-11-05Method and chamber for backside physical vapor deposition
#15 | 2020-08-27Film stack for lithography applications
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