Miyagi
Japan
9
2023-02-02
The entities that hold a legal rights for patent applications filed by inventor MATSUDA Risako:
Risako MATSUDA from Miyagi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE
#2 | 2021-09-30Method of calibrating multiple chamber pressure sensors
#3 | 2021-09-30Gas inspection method, substrate processing method, and substrate processing system
#4 | 2021-09-16Substrate processing method and substrate processing system
#5 | 2021-08-26Method and apparatus for measuring gas flow
#6 | 2021-08-19SUBSTRATE PROCESSING METHOD, GAS FLOW EVALUATION SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
#7 | 2020-09-17Method for calibrating plurality of chamber pressure sensors and substrate processing system
#8 | 2020-09-03Flow rate measurement apparatus and method for more accurately measuring gas flow to a substrate processing system
#9 | 2019-10-31Method for cleaning gas supply line and processing system
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