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Inventor profile of:

Eiki KAMATA

City:

Nirasaki City

Country:

Japan

Published Applications:

Last publication date:

2023-07-27

Top Assignees for applications by Eiki KAMATA

The entities that hold a legal rights for patent applications filed by inventor KAMATA Eiki:

TOKYO ELECTRON LIMITED 7 Tokyo, Japan

Recent patent applications by KAMATA Eiki

Eiki KAMATA from Nirasaki City, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2023-07-27

US20230238217A1

Electricity

PLASMA PROCESSING APPARATUS

#2 | 2021-07-22

US20210225612A1

Electricity

Array antenna and plasma processing apparatus

#3 | 2021-05-06

US20210134560A1

Electricity

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

#4 | 2021-04-29

US20210125814A1

Electricity

Control method and plasma processing apparatus

#5 | 2021-03-18

US20210082727A1

Electricity

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

#6 | 2021-03-11

US20210074517A1

Electricity

Plasma processing apparatus and control method

#7 | 2021-03-11

US20210074516A1

Electricity

Plasma probe device, plasma processing apparatus, and control method

#8 | 2021-02-04

US20210035788A1

Electricity

Plasma processing apparatus and control method

#9 | 2021-02-04

US20210035787A1

Electricity

Plasma processing apparatus and control method

#10 | 2020-12-31

US20200411340A1

Electricity

HEATING APPARATUS, HEATING METHOD, AND SUBSTRATE PROCESSING APPARATUS

#11 | 2020-12-10

US20200388473A1

Electricity

PLASMA ELECTRIC FIELD MONITOR, PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

#12 | 2020-09-17

US20200294842A1

Electricity

Plasma processing apparatus

InventorID:

2853093 ⎘