Eindhoven
Netherlands
10
2023-10-26
The entities that hold a legal rights for patent applications filed by inventor LI Chung-Hsun:
Chung-Hsun LI from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
DETERMINING LITHOGRAPHIC MATCHING PERFORMANCE
#2 | 2023-10-19Method for decision making in a semiconductor manufacturing process
#3 | 2022-12-08Calibration method for a lithographic system
#4 | 2022-06-02Method and system for determining overlay
#5 | 2022-03-17Method for decision making in a semiconductor manufacturing process
#6 | 2021-07-15Methods and apparatus for measuring a property of a substrate
#7 | 2020-10-08Methods and apparatus for measuring a property of a substrate
#8 | 2019-12-19METHOD OF DETERMINING PELLICLE DEGRADATION COMPENSATION CORRECTIONS, AND ASSOCIATED LITHOGRAPHIC APPARATUS AND COMPUTER PROGRAM
#9 | 2019-10-03Methods and apparatus for measuring a property of a substrate
#10 | 2017-06-08Methods and apparatus for measuring a property of a substrate
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