San Diego, California
United States
8
2020-01-09
The entities that hold a legal rights for patent applications filed by inventor Baumgart Peter:
Peter Baumgart from San Diego, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of purifying target material for an EUV light source
#2 | 2017-08-31Method and apparatus for purifying target material for EUV light source
#3 | 2016-09-22Target material supply apparatus for an extreme ultraviolet light source
#4 | 2016-05-05Apparatus for and method of supplying target material
#5 | 2014-09-18Method of and apparatus for supply and recovery of target material
#6 | 2014-04-17Target material supply apparatus for an extreme ultraviolet light source
#7 | 2013-06-20Filter for material supply apparatus
#8 | 2012-11-15Droplet generator with actuator induced nozzle cleaning
293696 ⎘