Frank Greer

Composite substrate for fabricating III-V photodetector arrays

Low Temperature Deposition of Silicon Containing Layers in Superconducting Circuits

Low temperature deposition of low loss dielectric layers in superconducting circuits

Fluorine Containing Low Loss Dielectric Layers for Superconducting Circuits

Superconducting junctions

Methods for Reducing Interface Contact Resistivity

Atomically precise surface engineering for producing imagers

Plasma cleaning of superconducting layers

Atomic layer deposition of metal-oxide tunnel barriers using optimized oxidants

Catalytic growth of Josephson junction tunnel barrier

Fluorine Passivation During Deposition of Dielectrics for Superconducting Electronics

Annealed dielectrics and heat-tolerant conductors for superconducting electronics

Plasma treatment of low-K surface to improve barrier deposition

Tantalum-Based Copper Barriers and Methods for Forming the Same

Multipurpose combinatorial vapor phase deposition chamber

Gate stacks and ohmic contacts for SiC devices

Plasma densification of dielectrics for improved dielectric loss tangent

Methods for Rapid Generation of ALD Saturation Curves Using Segmented Spatial ALD

Surface preparation with remote plasma

Methods and Systems for Forming Reliable Gate Stack on Semiconductors

Reduction of native oxides by annealing in reducing gas or plasma

UV treatment for ALD film densification

Gate stacks including TaSiO for MOSFETS

Methods for forming high-k dielectrics containing hafnium and zirconium using atomic layer deposition

Combinatorially variable etching of stacks including two dissimilar materials for etch pit density inspection

Nucleation interface for high-k layer on germanium

Atomic layer deposition of high performance anti reflection coatings on delta-doped CCDs

Methods for stripping photoresist and/or cleaning metal regions

Atomically precise surface engineering for producing imagers

Atomic layer deposition of chemical passivation layers and high performance anti-reflection coatings on back-illuminated detectors

Method of improving film non-uniformity and throughput

REAL TIME MONITORING OF INDIUM BUMP REFLOW AND OXIDE REMOVAL ENABLING OPTIMIZATION OF INDIUM BUMP MORPHOLOGY

Methods to fabricate and improve stand-alone and integrated filters

Delta-doping at wafer level for high throughput, high yield fabrication of silicon imaging arrays