Dongseok Han

City:

Daegu

Country:

South Korea

Published Applications:

Last publication date:

2025-05-08

Top Assignees for applications by Dongseok Han

The entities that hold a legal rights for patent applications filed by inventor Han Dongseok:

Dongseok Han from Daegu, KR has applied for patents for these inventions. The list has both pending applications and granted patents:

METHOD OF MEASURING PARAMETERS OF PLASMA, APPARATUS FOR MEASURING PARAMETERS OF PLASMA, PLASMA PROCESSING SYSTEM, AND METHOD OF PROCESSING WAFER

FOCUS RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME

Substrate processing apparatus and method of manufacturing semiconductor device using the same

Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing wafer

Method of etching at low temperature and plasma etching apparatus

InventorID:

3057144 ⎘