Baarlo
Netherlands
16
2012-01-12
The entities that hold a legal rights for patent applications filed by inventor SMITS Peter:
Peter SMITS from Baarlo, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Lithographic apparatus and device manufacturing method
#2 | 2011-07-28Lithographic apparatus and device manufacturing method
#3 | 2011-04-21LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
#4 | 2010-07-22Lithographic apparatus, device manufacturing method, seal structure, method of removing an object and a method of sealing
#5 | 2010-04-08Lithographic apparatus and device manufacturing method
#6 | 2010-02-25Lithographic apparatus and device manufacturing method
#7 | 2009-11-12LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
#8 | 2008-07-24Lithographic apparatus and device manufacturing method
#9 | 2008-07-03Substrate support and lithographic process
#10 | 2008-06-12Lithographic apparatus and device manufacturing method
#11 | 2007-05-24Lithographic apparatus and device manufacturing method
#12 | 2007-05-24Lithographic apparatus and device manufacturing method
#13 | 2007-04-12Lithographic apparatus with mounted sensor
#14 | 2006-09-14Lithographic apparatus, device manufacturing method, seal structure, method of removing an object and a method of sealing
#15 | 2006-06-08Lithographic apparatus and device manufacturing method
#16 | 2006-05-18Lithographic apparatus and device manufacturing method
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