Andrei Brunfeld

Optical inspection system with polarization isolation of detection system reflections

OPTICAL MEASURING SYSTEM WITH ILLUMINATION PROVIDED THROUGH A VOID IN A COLLECTING LENS

OPTICAL MEASURING SYSTEM WITH MATCHED COLLECTION LENS AND DETECTOR LIGHT GUIDE

FLUORESCENCE-DETECTING DISK INSPECTION SYSTEM

Scatterometer-interferometer and method for detecting and distinguishing characteristics of surface artifacts

Time dependent fluorescence measurements

Method and apparatus for simultaneous 2-D and topographical inspection

Method and system for optical measurement via a resonator having a non-uniform phase profile

Method and apparatus including in-resonator imaging lens for improving resolution of a resonator-enhanced optical system

Three-dimensional imaging resonator and method therefor

Resonator method and system for distinguishing characteristics of surface features or contaminants

Fabry-perot resonator apparatus and method including an in-resonator polarizing element

Resonant ellipsometer and method for determining ellipsometric parameters of a surface

Fabry-Perot resonator apparatus and method for observing low reflectivity surfaces

Apparatus and method for measuring thickness variation of wax film

Method and system for performing swept-wavelength measurements within an optical system incorporating a reference resonator

Measuring time dependent fluorescence

Time dependent fluorescence measurements

Active sensor and method for optical illumination and detection

Method and system for determining surface feature characteristics using slit detectors