Wolfersheim
Germany
13
2012-12-20
The entities that hold a legal rights for patent applications filed by inventor Heiden Michael:
Michael Heiden from Wolfersheim, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
#2 | 2012-02-09Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the Device
#3 | 2012-02-09Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the Device
#4 | 2010-05-06Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
#5 | 2009-11-12DEVICE AND METHOD FOR THE INSPECTION OF DEFECTS ON THE EDGE REGION OF A WAFER
#6 | 2009-03-19MEANS AND METHOD FOR DETERMINING THE SPATIAL POSITION OF MOVING ELEMENTS OF A COORDINATE MEASURING MACHINE
#7 | 2009-02-26METHOD FOR DETERMINING THE POSITION OF A MEASUREMENT OBJECTIVE IN THE Z-COORDINATE DIRECTION OF AN OPTICAL MEASURING MACHINE HAVING MAXIMUM REPRODUCIBILITY OF MEASURED STRUCTURE WIDTHS
#8 | 2009-01-15DEVICE AND METHOD FOR IMPROVING THE MEASUREMENT ACCURACY IN AN OPTICAL CD MEASUREMENT SYSTEM
#9 | 2008-08-28Apparatus and method for measuring structures on a mask and or for calculating structures in a photoresist resulting from the structures
#10 | 2008-08-28Device and method for automatic detection of incorrect measurements by means of quality factors
#11 | 2008-08-28Method for eliminating sources of error in the system correction of a coordinate measuring machine
#12 | 2008-08-14Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
#13 | 2007-02-15Method and device for reducing systematic measuring errors in the examination of objects
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