Saitama
Japan
8
2012-05-03
The entities that hold a legal rights for patent applications filed by inventor Suzuki Junichi:
Junichi Suzuki from Saitama, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for resizing pattern to be written by lithography technique, and charged particle beam writing method
#2 | 2012-02-09Method for resizing pattern to be written by lithography technique, and charged particle beam writing method
#3 | 2008-07-31Method for resizing pattern to be written by lithography technique, and charged particle beam writing method
#4 | 2008-07-31Charged particle beam writing apparatus and method thereof, and method for resizing dimension variation due to loading effect
#5 | 2008-04-03Beam shot position correction coefficient computation/updating technique for ultrafine pattern fabrication using variable shaped beam lithography
#6 | 2007-08-23Charged particle beam writing method and apparatus
#7 | 2007-08-16Pattern generation method and charged particle beam writing apparatus
#8 | 2007-08-16Multiple irradiation effect-corrected dose determination technique for charged particle beam lithography
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