NuFlare Technology, Inc.

Method for fabricating semiconductor device, pattern writing apparatus, recording medium recording program, and pattern transfer apparatus

#2 | 2016-06-09 ✅ Patent 10,120,284 granted on 2018-11-06

US20160161849A1

Multi charged particle beam writing apparatus and multi charged particle beam writing method

#3 | 2015-12-31

US20150377800A1

PATTERN TEST APPARATUS

#4 | 2015-10-29 ✅ Patent 9,535,327 granted on 2017-01-03

US20150309412A1

Method for fabricating semiconductor device, pattern writing apparatus, recording medium recording program, and pattern transfer apparatus

#5 | 2015-08-20 ✅ Patent 9,543,119 granted on 2017-01-10

US20150235807A1

Multi charged particle beam writing apparatus and method for correcting a current distribution of groups of charged particle beams

#6 | 2015-08-13 ✅ Patent 9,552,983 granted on 2017-01-24

US20150228477A1

Manufacturing method for semiconductor device

#7 | 2015-07-09 ✅ Patent 9,406,117 granted on 2016-08-02

US20150193918A1

Inspection system and method for inspecting line width and/or positional errors of a pattern

#8 | 2015-05-14 ✅ Patent 9,177,372 granted on 2015-11-03

US20150131892A1

Defect estimation device and method and inspection system and method

#9 | 2014-08-14 ✅ Patent 9,076,564 granted on 2015-07-07

US20140225008A1

Multi charged particle beam writing apparatus and multi charged particle beam writing method

#10 | 2014-03-20 ✅ Patent 9,018,602 granted on 2015-04-28

US20140077103A1

Charged particle beam writing apparatus and charged particle beam writing method

#11 | 2014-03-13 ✅ Patent 9,086,388 granted on 2015-07-21

US20140072202A1

Pattern evaluation method and apparatus

#12 | 2014-03-06 ✅ Patent 9,343,266 granted on 2016-05-17

US20140061499A1

Charged particle beam pattern writing method and charged particle beam writing apparatus that corrects beam rotation utilizing a correlation table

#13 | 2014-02-27 ✅ Patent 9,157,870 granted on 2015-10-13

US20140055780A1

Pattern test apparatus

#14 | 2014-02-27 ✅ Patent 9,194,817 granted on 2015-11-24

US20140055774A1

Defect detection method

#15 | 2014-02-27 ✅ Patent 8,803,108 granted on 2014-08-12

US20140054469A1

Method for acquiring settling time

#16 | 2014-01-16 ✅ Patent 9,141,750 granted on 2015-09-22

US20140017349A1

Charged particle beam writing apparatus and irradiation time apportionment method of charged particle beams for multiple writing

#17 | 2014-01-02 ✅ Patent 8,742,376 granted on 2014-06-03

US20140001380A1

Method and apparatus of mask drawing using a grounding body at lowest resistance value position of the mask

#18 | 2013-12-19 ✅ Patent 8,835,881 granted on 2014-09-16

US20130334442A1

Drift correction method and pattern writing data generation method

#19 | 2013-12-05 ✅ Patent 8,729,507 granted on 2014-05-20

US20130320230A1

Multi charged particle beam writing method and multi charged particle beam writing apparatus

#20 | 2013-11-28 ✅ Patent 9,268,234 granted on 2016-02-23

US20130316288A1

Charged particle beam lithography apparatus and charged particle beam pattern writing method

#21 | 2013-10-10 ✅ Patent 8,779,379 granted on 2014-07-15

US20130264499A1

Acquisition method of charged particle beam deflection shape error and charged particle beam writing method

#22 | 2013-10-10 ✅ Patent 9,164,044 granted on 2015-10-20

US20130264478A1

Charged particle beam lithography apparatus, inspection apparatus and inspection method of pattern writing data

#23 | 2013-10-03

US20130256555A1

SHAPING OFFSET ADJUSTMENT METHOD AND CHARGED PARTICLE BEAM DRAWING APPARATUS

#24 | 2013-10-03 ✅ Patent 8,872,141 granted on 2014-10-28

US20130256519A1

Charged particle beam writing apparatus and charged particle beam writing method

#25 | 2013-10-03 ✅ Patent 9,735,003 granted on 2017-08-15

US20130255569A1

Film-forming apparatus and film-forming method

#26 | 2013-09-26 ✅ Patent 9,159,555 granted on 2015-10-13

US20130253688A1

Multi charged particle beam writing apparatus and multi charged particle beam writing method

#27 | 2013-09-26 ✅ Patent 9,082,588 granted on 2015-07-14

US20130252172A1

Multi charged particle beam writing apparatus and multi charged particle beam writing method

#28 | 2013-09-26 ✅ Patent 9,299,533 granted on 2016-03-29

US20130252145A1

Multi charged particle beam writing apparatus utilizing multiple staged mutually orthogonal beam blankers

#29 | 2013-09-26 ✅ Patent 9,235,883 granted on 2016-01-12

US20130250095A1

Inspection system and method

#30 | 2013-09-19 ✅ Patent 8,927,941 granted on 2015-01-06

US20130240750A1

Multi charged particle beam writing apparatus and multi charged particle beam writing method with fixed voltage ratio einzel lens

#31 | 2013-08-22 ✅ Patent 9,373,424 granted on 2016-06-21

US20130216953A1

Electron beam writing apparatus and electron beam writing method

#32 | 2013-08-22 ✅ Patent 8,861,832 granted on 2014-10-14

US20130216120A1

Inspection system and method

#33 | 2013-08-22 ✅ Patent 8,816,276 granted on 2014-08-26

US20130214172A1

Electron beam writing apparatus and electron beam writing method

#34 | 2013-07-11 ✅ Patent 8,767,200 granted on 2014-07-01

US20130176559A1

Luminous flux branching element and mask defect inspection apparatus

#35 | 2013-06-20 ✅ Patent 8,741,547 granted on 2014-06-03

US20130157198A1

Multi charged particle beam writing apparatus and multi charged particle beam writing method

#36 | 2013-06-20

US20130156950A1

FILM-FORMING APPARATUS AND FILM-FORMING METHOD

#37 | 2013-06-20

US20130152853A1

FILM-FORMING APPARATUS AND FILM-FORMING METHOD

#38 | 2013-05-30 ✅ Patent 8,759,799 granted on 2014-06-24

US20130134329A1

Charged particle beam writing apparatus and charged particle beam writing method

#39 | 2013-05-02

US20130104800A1

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

#40 | 2013-04-25 ✅ Patent 8,552,405 granted on 2013-10-08

US20130099139A1

Charged particle beam writing apparatus and charged particle beam writing method

#41 | 2013-04-18 ✅ Patent 8,781,212 granted on 2014-07-15

US20130094752A1

Defect estimation device and method and inspection system and method

#42 | 2013-04-18 ✅ Patent 8,983,113 granted on 2015-03-17

US20130093878A1

Defect estimation device and method and inspection system and method

#43 | 2013-04-04 ✅ Patent 8,797,525 granted on 2014-08-05

US20130083318A1

Pattern inspection apparatus and pattern inspection method

#44 | 2013-04-04 ✅ Patent 8,847,178 granted on 2014-09-30

US20130082193A1

Charged particle beam writing apparatus and charged particle beam writing method

#45 | 2013-04-04 ✅ Patent 8,492,732 granted on 2013-07-23

US20130082187A1

Multi charged particle beam writing apparatus and multi charged particle beam writing method

#46 | 2013-03-14 ✅ Patent 8,748,064 granted on 2014-06-10

US20130065184A1

Charged particle beam drawing method and charged particle beam drawing apparatus

#47 | 2013-03-07 ✅ Patent 8,710,467 granted on 2014-04-29

US20130056647A1

Multi charged particle beam writing apparatus and multi charged particle beam writing method

#48 | 2013-03-07 ✅ Patent 8,586,951 granted on 2013-11-19

US20130056645A1

Multi charged particle beam writing apparatus and multi charged particle beam writing method

#49 | 2013-02-21 ✅ Patent 9,542,586 granted on 2017-01-10

US20130044205A1

Pattern inspection apparatus and pattern inspection method

#50 | 2013-02-14 ✅ Patent 8,748,843 granted on 2014-06-10

US20130037724A1

Charged particle beam drawing apparatus and charged particle beam drawing method

#51 | 2013-01-10 ✅ Patent 8,452,074 granted on 2013-05-28

US20130010291A1

Apparatus and method for pattern inspection

#52 | 2012-12-27 ✅ Patent 9,273,412 granted on 2016-03-01

US20120325138A1

Film-forming apparatus and film-forming method

#53 | 2012-12-06 ✅ Patent 10,578,560 granted on 2020-03-03

US20120307043A1

Inspection apparatus and method for detecting false defects

#54 | 2012-11-22 ✅ Patent 8,563,952 granted on 2013-10-22

US20120292537A1

Charged particle beam writing apparatus

#55 | 2012-11-22 ✅ Patent 9,006,691 granted on 2015-04-14

US20120292536A1

Charged particle beam writing apparatus and charged particle beam writing method using a generated frame that surrounds a first data processing block

#56 | 2012-11-15

US20120286174A1

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM WRITING METHOD

#57 | 2012-10-04 ✅ Patent 9,122,176 granted on 2015-09-01

US20120252215A1

Method for fabricating semiconductor device, pattern writing apparatus, recording medium recording program, and pattern transfer apparatus

#58 | 2012-10-04 ✅ Patent 8,779,394 granted on 2014-07-15

US20120248340A1

Charged particle beam writing apparatus and charged particle beam writing method

#59 | 2012-08-23 ✅ Patent 8,859,997 granted on 2014-10-14

US20120211676A1

Charged particle beam writing apparatus and charged particle beam writing method

#60 | 2012-08-23 ✅ Patent 9,063,440 granted on 2015-06-23

US20120211674A1

Charged particle beam writing apparatus and charged particle beam writing method

#61 | 2012-08-02 ✅ Patent 8,610,096 granted on 2013-12-17

US20120193553A1

Charged particle beam writing apparatus and method

#62 | 2012-07-26 ✅ Patent 8,755,040 granted on 2014-06-17

US20120189032A1

Illuminating apparatus, pattern inspection apparatus, and method of forming illuminating light

#63 | 2012-07-26 ✅ Patent 8,431,908 granted on 2013-04-30

US20120187307A1

Charged particle beam writing apparatus and charged particle beam writing method

#64 | 2012-06-07 ✅ Patent 9,057,711 granted on 2015-06-16

US20120140060A1

Inspection apparatus and method

#65 | 2012-05-24 ✅ Patent 8,878,149 granted on 2014-11-04

US20120126145A1

Charged particle beam writing apparatus and charged particle beam writing method

#66 | 2012-05-03 ✅ Patent 8,352,889 granted on 2013-01-08

US20120108063A1

Beam dose computing method and writing method and record carrier body and writing apparatus

#67 | 2012-05-03 ✅ Patent 8,527,913 granted on 2013-09-03

US20120104286A1

Method for resizing pattern to be written by lithography technique, and charged particle beam writing method

#68 | 2012-04-12 ✅ Patent 9,218,942 granted on 2015-12-22

US20120085940A1

Charged particle beam writing apparatus and charged particle beam writing method

#69 | 2012-04-05

US20120081538A1

PATTERN INSPECTION APPARATUS

#70 | 2012-03-22 ✅ Patent 8,563,953 granted on 2013-10-22

US20120068089A1

Charged particle beam writing apparatus and charged particle beam writing method

#71 | 2012-02-09 ✅ Patent 8,429,575 granted on 2013-04-23

US20120036486A1

Method for resizing pattern to be written by lithography technique, and charged particle beam writing method

#72 | 2012-01-12 ✅ Patent 8,502,175 granted on 2013-08-06

US20120007002A1

Charged particle beam pattern forming apparatus and charged particle beam pattern forming method

#73 | 2012-01-05 ✅ Patent 8,466,440 granted on 2013-06-18

US20120001097A1

Charged particle beam drawing apparatus and control method thereof

#74 | 2011-12-01 ✅ Patent 9,188,853 granted on 2015-11-17

US20110291029A1

Charged particle beam drawing apparatus and control method thereof

#75 | 2011-11-24 ✅ Patent 8,301,291 granted on 2012-10-30

US20110286319A1

Charged particle beam writing apparatus, write data creation method and charged particle beam writing method

#76 | 2011-10-20 ✅ Patent 9,036,896 granted on 2015-05-19

US20110255770A1

Inspection system and method for inspecting line width and/or positional errors of a pattern

#77 | 2011-10-20 ✅ Patent 8,427,919 granted on 2013-04-23

US20110255388A1

Pattern writing system and method and abnormality diagnosing method

#78 | 2011-10-20 ✅ Patent 8,791,432 granted on 2014-07-29

US20110253912A1

Charged particle beam writing apparatus and charged particle beam writing method

#79 | 2011-10-20 ✅ Patent 8,610,091 granted on 2013-12-17

US20110253911A1

Charged particle beam writing apparatus and charged particle beam writing method

#80 | 2011-09-22 ✅ Patent 9,552,963 granted on 2017-01-24

US20110231134A1

Charged particle beam writing apparatus and method therefor

#81 | 2011-08-04 ✅ Patent 8,737,676 granted on 2014-05-27

US20110188734A1

Defect estimation device and method and inspection system and method

#82 | 2011-08-04

US20110186744A1

CHARGED PARTICLE BEAM APPARATUS AND METHOD

#83 | 2011-07-21 ✅ Patent 8,548,223 granted on 2013-10-01

US20110176719A1

Inspection system and method

#84 | 2011-06-30 ✅ Patent 8,779,397 granted on 2014-07-15

US20110155930A1

Substrate cover and charged particle beam writing method using same

#85 | 2011-05-26

US20110121208A1

CHARGED PARTICLE BEAM DRAWING APPARATUS AND ELECTRICAL CHARGING EFFECT CORRECTION METHOD THEREOF

#86 | 2011-05-19 ✅ Patent 8,653,488 granted on 2014-02-18

US20110114853A1

Electron beam apparatus

#87 | 2011-04-21 ✅ Patent 8,755,599 granted on 2014-06-17

US20110091099A1

Performing operations; transporting

Review apparatus and inspection system

#88 | 2011-04-21

US20110089346A1

METHOD AND SYSTEM FOR PATTERN WRITING WITH CHARGED-PARTICLE BEAM

#89 | 2011-03-24 ✅ Patent 8,207,514 granted on 2012-06-26

US20110068281A1

Charged particle beam drawing apparatus and proximity effect correction method thereof

#90 | 2011-03-17 ✅ Patent 8,755,924 granted on 2014-06-17

US20110066272A1

Charged particle beam writing method and apparatus therefor

#91 | 2011-03-17 ✅ Patent 8,471,225 granted on 2013-06-25

US20110066271A1

Charged particle beam writing method and apparatus therefor

#92 | 2011-02-24 ✅ Patent 8,183,545 granted on 2012-05-22

US20110046762A1

Charged particle beam writing apparatus, charged particle beam writing method and apparatus of processing data for charged particle beam writing

#93 | 2011-02-24 ✅ Patent 8,903,158 granted on 2014-12-02

US20110044529A1

Inspection system and inspection method

#94 | 2011-02-24 ✅ Patent 9,031,313 granted on 2015-05-12

US20110044528A1

Inspection system

#95 | 2011-02-10 ✅ Patent 8,481,964 granted on 2013-07-09

US20110033788A1

Charged particle beam drawing apparatus and method

#96 | 2011-02-10 ✅ Patent 8,178,856 granted on 2012-05-15

US20110031387A1

Charged particle beam writing apparatus and method thereof

#97 | 2011-01-20 ✅ Patent 8,188,449 granted on 2012-05-29

US20110012031A1

Charged particle beam drawing method and apparatus

#98 | 2010-12-02 ✅ Patent 8,307,314 granted on 2012-11-06

US20100306721A1

Write error verification method of writing apparatus and creation apparatus of write error verification data for writing apparatus

#99 | 2010-11-18 ✅ Patent 8,237,139 granted on 2012-08-07

US20100290023A1

Method for detecting substrate position of charged particle beam photolithography apparatus and charged particle beam photolithography apparatus

#100 | 2010-11-18 ✅ Patent 8,247,783 granted on 2012-08-21

US20100288939A1