Eindhoven
Netherlands
3
2012-02-16
The entities that hold a legal rights for patent applications filed by inventor Seijger Olav:
Olav Seijger from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Magnetic bearing, a rotary stage, and a reflective electron beam lithography apparatus
#2 | 2011-07-21Inspection method and apparatus
#3 | 2011-06-16Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
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